About: http://webisa.webdatacommons.org/269280878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, an insulating film including silicon is formed in thickness from 30 to 200 nm by the sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com