| http://www.w3.org/ns/prov#value | - FIG. 9A is a plan view of a polishing pad of the present invention containing a plurality of grooves each having five positive-curvature flow control segments and four sharp discontinuities in slope within the polishing track; FIG. 9B is a plot of the trajectory of each groove of FIG. 9A; FIG. 9C is a plot of the slope of the trajectory of each groove of FIG. 9A; FIG. 9D is a plot of the extrinsic
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