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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20090117289Method and apparatus for deposition of thin film materials for energy storage devices - The present invention is a method and apparatus for applying coatings in a rarefied gaseous medium.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org