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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	enced by (7), Classifications (14), Legal Events (2) External Links: USPTO, USPTO Assignment, EspacenetNon-volatile memory devices including etching protection layers and methods of forming the same
http://www.w3.org/ns/prov#wasQuotedFrom	google.com