About: http://webisa.webdatacommons.org/270280480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An inactive gas such as argon is admitted into the chamber at a very low pressure and is excited into a plasma by biasing the target negatively with respect to the chamber wall or other part.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de