About: http://webisa.webdatacommons.org/270632716

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a low-k dielectric material such as a fluorinated oxide of silicon (e.g., SiOF) or carbon doped oxide of silicon (e.g., carbon doped silicon dioxide, SiO2) may be deposited by Chemical Vapor Deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com