About: http://webisa.webdatacommons.org/270753804

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To electrically isolate IGFETs or other devices fabricated within the same silicon substrate, techniques such as LOCOS and SWAMI are used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com