| http://www.w3.org/ns/prov#value | - ide film to form the portion of the active region, the portion of the active region having an inclined portion on a surface thereof; forming a first gate insulating film on the inclined portion of the active region and a second gate insulating film on the active region except for the inclined portion; forming a floating gate electrode on the first gate insulating film; forming a third gate insulat
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