About: http://webisa.webdatacommons.org/271514941

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A layer 1130 of a material such as BST or a layered superlattice material is then deposited utilizing the apparatus and methods of the invention discussed below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com