| http://www.w3.org/ns/prov#value | - iconductor Energy Laboratory Co., Ltd.Semiconductor device including a silicon film having an irregular surfaceUS5624851Mar 8, 1994Apr 29, 1997Semiconductor Energy Laboratory Co., Ltd.Process of fabricating a semiconductor device in which one portion of an amorphous silicon film is thermally crystallized and another portion is laser crystallizedUS5637515Jan 3, 1996Jun 10, 1997Semiconductor Energy
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