| http://www.w3.org/ns/prov#value | - Due to variables such as heat losses at the peripheral edges of the wafer and the susceptor 134, the flow of reactant gas through the chamber 10, and the like, the LED heating lamps 180 may be ideally set to normally operate at temperatures which are offset, i.e. different than the desired operating temperature in the central area of the wafer and the susceptor 134.
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