About: http://webisa.webdatacommons.org/272069189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 wherein said fluorine-containing source is either NF3 or a fluorocarbon having a formula of CnF2n+2 where n is a positive integer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com