PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The insulating layer is formed of a single layer or stacked layers by plasma CVD or sputtering using an inorganic material such as silicon, an oxide of silicon, and a nitride of silicon, or an organic material such as an organic resin.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com