About: http://webisa.webdatacommons.org/272197189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This is because a material such as silica easily reacts with the material of piezo-electric/electrostrictive layer 22 during the heat treatment thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com