About: http://webisa.webdatacommons.org/272293895

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention achieves the foregoing and other objects by providing a method, for use with a photo-lithographic system, for determining whether a wafer satisfies a predetermined product quality level using statistical modeling.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com