| http://www.w3.org/ns/prov#value | - FIG. 4 is a graph, a curve A showing the percentage of the remaining resist in a cross section along a line IV--IV shown in FIG. 2, a curve B showing the relation between the irradiation intensity of the electron beam and the percentage of the remaining resist, and a curve C showing the irradiation intensity distribution of the electron beam satisfying the percentage of the remaining resist repres
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