About: http://webisa.webdatacommons.org/272536299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensors and other components are preferably attached to the bottom of the disc cavities, as illustrated in FIG. 11B where the temperature sensing chips 1301 and 1302 are attached to the bottoms of respective cavities 1335 and 1337.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com