About: http://webisa.webdatacommons.org/272635469

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithographic reticles typically include asubstrate made of an optically transparent material, such as quartz (i.e., silicon dioxide, SiO.sub.2), having an opaque light-shielding layer, or photomask, typically a metal, such as chro
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com