About: http://webisa.webdatacommons.org/272640389

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon substrate 52 is thinned and polished to make good contact with the HOE substrate 46 that, in general, may be made out of materials having high optical transmission and good thermal conductivity, such as diamond or sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com