About: http://webisa.webdatacommons.org/272693296

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lower electrode is formed as a byproduct of the SALICIDE process while the upper electrode is formed by first laying down a layer of polysilicon followed by a layer of a silicide-forming metal such as titanium, cobalt, or tungsten.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com