About: http://webisa.webdatacommons.org/272773565

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The flushing treatment can prevent impurities such as oxygen, nitrogen, or fluorine in the reaction chamber from contaminating the film to be deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr