| http://www.w3.org/ns/prov#value | - With the optical displacement measuring device 10A(1) according to a modification, the measuring device main unit 100 including the diffraction grating 11T to be attached to the movable portion such as a tooling machine or the like; various types of optical component for obtaining the interference beam Ld; and the optical module 72 for performing photoelectric conversion are connected by the optic
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