About: http://webisa.webdatacommons.org/272950833

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The system of claim 20, wherein the substrate is a semiconductor wafer, and wherein the plurality of devices are a plurality of semiconductor chips. 22.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com