About: http://webisa.webdatacommons.org/273054742

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The test board of claim 16, wherein the semiconductor device is a memory device, and wherein the measured parameter includes a scattering parameter. 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com