About: http://webisa.webdatacommons.org/273189828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, the wafer is protected from bombardment by the charged particles, such as ions, which may cause deterioration of the semiconductor materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com