| http://www.w3.org/ns/prov#value | - is formed in the semiconductor device shown in FIG. 1A and FIG. 1B. [0015]FIG. 4 is a top view schematically showing still another example of the state before the through plug 15 is formed in the semiconductor device shown in FIG. 1A and FIG. 1B. [0016]FIG. 5 is a top view schematically showing yet another example of the state before the through plug 15 is formed. [0017]FIG. 6 is a top view schema
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