About: http://webisa.webdatacommons.org/273272603

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first and second sets of bottom electrodes 2010, 2020 can be formed by depositing electrode material on the structure illustrated in FIG. 7, followed by a planarization process such as CMP to expose a top surface of dielectric 700.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com