About: http://webisa.webdatacommons.org/273336723

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 1 is an insulating substrate comprising the single-crystal silicon substrate 1a and the insulating layer 1b made of SiO2 or the like, the substrate 1 having a plurality of ridge-like projections 12 on the surface thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr