About: http://webisa.webdatacommons.org/273662477

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As illustrated in FIG. 3e, layer 174, formed from materials such as boron doped glass, doped polysilicon, silicon oxide, or silicon nitride, is formed on sidewalls of trench 172.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com