About: http://webisa.webdatacommons.org/273681095

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As another example, MEMS structure is used to sense pressure, temperature, motion or other environmental characteristics and semiconductor devices process the sensed information.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com