| http://www.w3.org/ns/prov#value | - As well as the third interlayer insulating film 6008, the film which is hard to transmit the material causing to promote deterioration of the light emitting element such as moisture and oxygen, for example a DLC film, carbon nitride film, silicon nitride film or the like formed by the RF sputtering method is used as the passivation film 6016.
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