About: http://webisa.webdatacommons.org/27376995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is an important emerging technology used to design miniaturized components that are cheap to produce and suitable for a multitude of applications.
http://www.w3.org/ns/prov#wasQuotedFrom	phys.org