| http://www.w3.org/ns/prov#value | - With respect to such a request, a material containing silicon such as a silicon oxide layer and a silicon oxide nitride layer, etc., as a component element was suitable. [0008] Thus, in an attempt to improve the performance of a monolithic type liquid crystal display device, an attempt to improve the performance of TFTs by only increasing the crystalline grain size of a crystalline semiconductor l
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