| http://www.w3.org/ns/prov#value | - implanting of the first species is carried out before that of the second species, The source substrate is made from a material chosen from the group consisting of semiconductors and insulators, single crystal, polycrystalline or amorphous; a semiconductor can thus be chosen from Group IV of the Periodic Table of the Elements, for example silicon (which corresponds to a case of great technical impo
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