About: http://webisa.webdatacommons.org/274273382

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Briefly, in the semiconductor industry, microlithography (hereinafter ???lithography???) is the process of printing the integrated circuit (???IC???) patterns on a wafer (for example, a semiconductor wafer such as silicon or GaAs).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com