| http://www.w3.org/ns/prov#value | - BACKGROUND ART [0003] Hitherto, a heater, a wafer prober and the like, using a metal base material such as stainless steel or aluminum alloy, has been used in semiconductor producing or examining devices comprising an etching device, a chemical vapor deposition device and the like. [0004] However, a heater made of a metal has problems that its temperature controllability is poor and its thickness
|
