About: http://webisa.webdatacommons.org/274334998

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the aluminum oxide has a purity of at least about 99.5% to reduce contamination of the chamber 100 by undesirable elements such as iron.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com