| http://www.w3.org/ns/prov#value | - FIG. 7 is a plan view showing the susceptor 32A as a heater unit of the present invention, which shows an internal heater 35A in a see-through state.The susceptor 32A is formed as a disk-shaped member made of a ceramic material such as AlN, Al2O3, SiC or SiO. The susceptor 32A is divided into two, an outer area 32Aa and an inner area 32Ab, in a radial direction thereof, and heaters 35Aa and 35Ab a
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