About: http://webisa.webdatacommons.org/274518739

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, a dielectric film to be formed in this step is a type insoluble in hydrofluoric acid for use in a pretreatment for the silicide formation, such as a silicon nitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com