| http://www.w3.org/ns/prov#value | - icates with a vacuum evacuation process chamber for evacuating the film forming chamber. [0038] The manufacturing apparatus may be a multi-chamber type manufacturing apparatus. [0039] As main processes which may mix an impurity such as oxygen or water with an EL material or a metal material to be deposited, a process of setting the EL material in the film forming chamber before deposition, a depos
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