About: http://webisa.webdatacommons.org/274969813

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, a suitable silane flow rate for forming a compressively stressed silicon nitride film may be from about 70 sccm to about 120 sccm, such as about 50 sccm to about 240 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au