About: http://webisa.webdatacommons.org/275004124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to this aspect, processes such as an etching, deposition, oxidation, diffusion, epitaxial growth etc. can be carried out on a substrate's surface having no native oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au