| http://www.w3.org/ns/prov#value | - ing a mask provided with a grating-like structure, a so-called reticle 5, via which the later structures are imaged on a reduced scale on the wafer 2, a device 6 for the mounting, movement and exact positioning of the wafer 2, and an imaging device, namely a projection objective 7, having a plurality of optical elements, such as e.g. lenses and mirrors, which are mounted in an objective housing of
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