About: http://webisa.webdatacommons.org/275513711

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Tantalum or a tantalum compound, titanium or a titanium compound, or tungsten or a tungsten compound, and other suitable materials can be used for the capping layer 26.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com