About: http://webisa.webdatacommons.org/275982243

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 where the substrate is a silicon wafer and the carbonaceous material is a photoresist. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com