| http://www.w3.org/ns/prov#value | - Since the time period during which the photoresist 14 is exposed determines the light intensities (of the light intensity curve 23) that activate the photoresist tl4, it is possible to expose the photoresist 14 for different periods of time and to construct a graph, such as shown in FIG. 17, wherein the relative line widths, defined by the photoresist 14, can be plotted against relative exposure t
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