About: http://webisa.webdatacommons.org/276327928

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The formation of the PZT element according to the present invention will be described according to a process, shown in FIGS. 1 and 4, particularly with respect to an element in a thin film form.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com