About: http://webisa.webdatacommons.org/276359869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electromechanical conformal grating device claimed in claim 1, wherein the force is an electrostatic force.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com