About: http://webisa.webdatacommons.org/276400470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These techniques are particularly useful for making in situ measurements during rapid thermal processing (RTP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es