About: http://webisa.webdatacommons.org/276403045

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is applicable to the manufacture of various types of semiconductor devices, particularly high density semiconductor devices having a design rule of about 0.18 ?? and under.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com